Pressure dependence of the Al ion energy distribution functions during filtered cathodic arc thin film growth in an Ar, O2 ambient

Atiser, Adil; Mráz, Stanislav; Schneider, Jochen M.

Bristol : IOP Publ. (2009)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 42
Issue: 1
Page(s)/Article-Nr.: 015202

Institutions

  • Chair of Materials Chemistry [521110]
  • Division of Materials Science and Engineering [520000]

Identifier