Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films

Aliramaji, Shamsa (Corresponding author); Keuter, Philipp; Neuß, Deborah; Hans, Marcus; Primetzhofer, Daniel; Depla, Diederik; Schneider, Jochen M.

Basel : MDPI (2023)
Contribution to a book, Journal Article

In: Materials
Volume: 16
Issue: 1
Page(s)/Article-Nr.: 414