Dense Ti0.67Hf0.33B1.7 thin films grown by hybrid HfB2-HiPIMS/TiB2-DCMS co-sputtering without external heating

Bakhit, Babak (Corresponding author); Mráz, Stanislav; Lu, Jun; Rosen, Johanna; Schneider, Jochen M.; Hultman, Lars; Petrov, Ivan; Greczynski, Grzegorz

Amsterdam [u.a.] : Elsevier Science (2021)
Fachzeitschriftenartikel

In: Vacuum : surface engineering, surface instrumentation & vacuum technology
Band: 186
Seite(n)/Artikel-Nr.: 110057