Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation

Greczynski, Grzegorz (Corresponding author); Mráz, Stanislav; Rueß, Holger; Hans, Marcus; Lu, J.; Hultman, L.; Schneider, Jochen M.

Melville, NY : American Inst. of Physics (2017)
Fachzeitschriftenartikel

In: Journal of applied physics
Band: 122
Heft: 2
Seite(n)/Artikel-Nr.: 025304