Native target chemistry during reactive dc magnetron sputtering studied by ex-situ x-ray photoelectron spectroscopy

Greczynski, Grzegorz; Mráz, Stanislav; Schneider, Jochen M.; Hultman, L.

Melville, NY : American Inst. of Physics (2017)
Journal Article

In: Applied physics letters
Volume: 111
Issue: 2
Page(s)/Article-Nr.: 021604