Native target chemistry during reactive dc magnetron sputtering studied by ex-situ x-ray photoelectron spectroscopy
Greczynski, Grzegorz; Mráz, Stanislav; Schneider, Jochen M.; Hultman, L.
Melville, NY : American Inst. of Physics (2017)
Journal Article
In: Applied physics letters
Volume: 111
Issue: 2
Page(s)/Article-Nr.: 021604
Identifier
- DOI: 10.1063/1.4993787
- RWTH PUBLICATIONS: RWTH-2017-07394