Native target chemistry during reactive dc magnetron sputtering studied by ex-situ x-ray photoelectron spectroscopy

Greczynski, Grzegorz; Mráz, Stanislav; Schneider, Jochen M.; Hultman, L.

Melville, NY : American Inst. of Physics (2017)
Fachzeitschriftenartikel

In: Applied physics letters
Band: 111
Heft: 2
Seite(n)/Artikel-Nr.: 021604

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