Angle-resolved evolution of the composition of Cr–Al–C thin films deposited by sputtering of a compound target

Mráz, Stanislav; Emmerlich, Jens; Weyand, Felix; Schneider, Jochen M.

Bristol : IOP Publ. [u.a.] (2013)
Journal Article

In: Journal of physics / D, Applied physics
Volume: 46
Issue: 13
Page(s)/Article-Nr.: 135501