Angle-resolved evolution of the composition of Cr–Al–C thin films deposited by sputtering of a compound target
Mráz, Stanislav; Emmerlich, Jens; Weyand, Felix; Schneider, Jochen M.
Bristol : IOP Publ. [u.a.] (2013)
Journal Article
In: Journal of physics / D, Applied physics
Volume: 46
Issue: 13
Page(s)/Article-Nr.: 135501
Identifier
- DOI: 10.1088/0022-3727/46/13/135501
- RWTH PUBLICATIONS: RWTH-CONV-076453